Repeatability of indium oxide gas sensors for detecting methane at low temperature

Published 2016 View Full Article

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Title
Repeatability of indium oxide gas sensors for detecting methane at low temperature
Authors
Keywords
In, 2, O, 3, Transparent film, Gas sensing, Thermal evaporation
Journal
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
Volume 56, Issue -, Pages 260-264
Publisher
Elsevier BV
Online
2016-09-16
DOI
10.1016/j.mssp.2016.09.007

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