Enhanced photoluminescence properties of Cu-doped ZnO thin films deposited by simultaneous RF and DC magnetron sputtering

Published 2016 View Full Article

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Title
Enhanced photoluminescence properties of Cu-doped ZnO thin films deposited by simultaneous RF and DC magnetron sputtering
Authors
Keywords
Thin films, Sputtering, Cu-doped ZnO, Crystal structure, Luminescence
Journal
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
Volume 49, Issue -, Pages 8-14
Publisher
Elsevier BV
Online
2016-03-25
DOI
10.1016/j.mssp.2016.03.023

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