4.6 Article

Influence of substrate pre-treatments by Xe+ ion bombardment and plasma nitriding on the behavior of TiN coatings deposited by plasma reactive sputtering on 100Cr6 steel

Journal

MATERIALS CHEMISTRY AND PHYSICS
Volume 177, Issue -, Pages 156-163

Publisher

ELSEVIER SCIENCE SA
DOI: 10.1016/j.matchemphys.2016.04.010

Keywords

Ion implantation; Nitriding; Ion beam-assisted deposition; Tribology; Wear

Funding

  1. NanoCom Network (Proposal FP7), European Union [247524]
  2. CREATe-Network project, European Union [H2020-MSCA-RISE/644013]
  3. Conselho Nacional de Desenvolvimento Cientifico e Tecnologico (CNPq)
  4. Comissao de Aperfeicoamento de Pessoal do Nivel Superior (CAPES)
  5. FAPESP [2010/11391-2, 2012/10127-5]
  6. Fundacao de Amparo a Pesquisa do Estado de Sao Paulo (FAPESP) [10/11391-2] Funding Source: FAPESP

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In this paper the influence of pre-treating a 100Cr6 steel surface by Xe+ ion bombardment and plasma nitriding at low temperature (380 degrees C) on the roughness, wear resistance and residual stresses of thin TiN coatings deposited by reactive IBAD was investigated. The Xe+ ion bombardment was carried out using a 1.0 keV kinetic energy by a broad ion beam assistance deposition (IBAD, Kaufman cell). The results showed that in the studied experimental conditions the ion bombardment intensifies nitrogen diffusion by creating lattice imperfections, stress, and increasing roughness. In case of the combined pre-treatment with Xe+ ion bombardment and subsequent plasma nitriding, the samples evolved relatively high average roughness and the wear volume increased in comparison to the substrates exposed to only nitriding or ion bombardment. (C) 2016 Elsevier B.V. All rights reserved.

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