Deposition characteristics of titanium coating deposited on SiC fiber by cold-wall chemical vapor deposition

Published 2016 View Full Article

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Title
Deposition characteristics of titanium coating deposited on SiC fiber by cold-wall chemical vapor deposition
Authors
Keywords
Metals, Chemical vapor deposition (CVD), Coatings, Microstructure, Thermodynamic properties
Journal
MATERIALS CHEMISTRY AND PHYSICS
Volume 184, Issue -, Pages 189-196
Publisher
Elsevier BV
Online
2016-09-15
DOI
10.1016/j.matchemphys.2016.09.041

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