One-dimensional Ar-SF6 hydromodel at low-pressure in e-beam generated plasmas

Published 2016 View Full Article

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Title
One-dimensional Ar-SF6 hydromodel at low-pressure in e-beam generated plasmas
Authors
Keywords
-
Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 34, Issue 2, Pages 021302
Publisher
American Vacuum Society
Online
2016-02-02
DOI
10.1116/1.4940885

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