Hardness, elastic modulus, and wear resistance of hafnium oxide-based films grown by atomic layer deposition

Published 2016 View Full Article

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Title
Hardness, elastic modulus, and wear resistance of hafnium oxide-based films grown by atomic layer deposition
Authors
Keywords
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Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 34, Issue 5, Pages 051510
Publisher
American Vacuum Society
Online
2016-08-18
DOI
10.1116/1.4961113

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