Low-temperature atomic layer deposition of TiO2 thin layers for the processing of memristive devices

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Title
Low-temperature atomic layer deposition of TiO2 thin layers for the processing of memristive devices
Authors
Keywords
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Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 34, Issue 1, Pages 01A147
Publisher
American Vacuum Society
Online
2015-12-25
DOI
10.1116/1.4938465

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