Ag films grown by remote plasma enhanced atomic layer deposition on different substrates

Title
Ag films grown by remote plasma enhanced atomic layer deposition on different substrates
Authors
Keywords
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Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 34, Issue 1, Pages 01A126
Publisher
American Vacuum Society
Online
2015-11-24
DOI
10.1116/1.4936221

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