Structural and chemical analysis of annealed plasma-enhanced atomic layer deposition aluminum nitride films

Title
Structural and chemical analysis of annealed plasma-enhanced atomic layer deposition aluminum nitride films
Authors
Keywords
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Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 34, Issue 4, Pages 041506
Publisher
American Vacuum Society
Online
2016-06-04
DOI
10.1116/1.4953029

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