Native oxide transport and removal during the atomic layer deposition of Ta2O5 on InAs(100) surfaces

Title
Native oxide transport and removal during the atomic layer deposition of Ta2O5 on InAs(100) surfaces
Authors
Keywords
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Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 34, Issue 3, Pages 031101
Publisher
American Vacuum Society
Online
2016-03-31
DOI
10.1116/1.4945115

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