Characterization of a cold cathode Penning ion source for the implantation of noble gases beneath 2D monolayers on metals: Ions and neutrals

Published 2016 View Full Article

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Title
Characterization of a cold cathode Penning ion source for the implantation of noble gases beneath 2D monolayers on metals: Ions and neutrals
Authors
Keywords
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Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 34, Issue 2, Pages 020602
Publisher
American Vacuum Society
Online
2016-01-09
DOI
10.1116/1.4939507

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