Ba(ZrxTi1−x)O3 thin films for tunable microwave applications

Authors

Keywords

B. Grain size, Ba(Zr, , Ti, , )O, 3, films, Reactive sputtering, Metal targets, Coplanar capacitor

Journal

Volume 41, Issue -, Pages S323-S330

Publisher

Elsevier BV

Online

2015-04-06

DOI

10.1016/j.ceramint.2015.03.184

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