Conformal Growth of Hexagonal Boron Nitride on High-Aspect-Ratio Silicon-Based Nanotrenches
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Title
Conformal Growth of Hexagonal Boron Nitride on High-Aspect-Ratio Silicon-Based Nanotrenches
Authors
Keywords
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Journal
Chemistry of Materials
Volume 35, Issue 6, Pages 2429-2438
Publisher
American Chemical Society (ACS)
Online
2023-03-14
DOI
10.1021/acs.chemmater.2c03568
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