24.4 W/mm X band GaN HEMTs on AlN substrates with the LPCVD grown high breakdown field SiNx layer

Title
24.4 W/mm X band GaN HEMTs on AlN substrates with the LPCVD grown high breakdown field SiNx layer
Authors
Keywords
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Journal
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2023-01-10
DOI
10.1109/jeds.2023.3234235

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