Fault prognosis for batch production based on percentile measure and gamma process: Application to semiconductor manufacturing

Published 2016 View Full Article

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Title
Fault prognosis for batch production based on percentile measure and gamma process: Application to semiconductor manufacturing
Authors
Keywords
Batch manufacturing processes, Fault prognosis, Multidimensional data processing, Percentile measure, Stochastic process
Journal
JOURNAL OF PROCESS CONTROL
Volume 48, Issue -, Pages 72-80
Publisher
Elsevier BV
Online
2016-11-03
DOI
10.1016/j.jprocont.2016.10.003

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