Radio frequency magnetron sputtering of Li 7 La 3 Zr 2 O 12 thin films for solid-state batteries

Title
Radio frequency magnetron sputtering of Li 7 La 3 Zr 2 O 12 thin films for solid-state batteries
Authors
Keywords
Thin film, Li, 7, La, 3, Zr, 2, O, 12, Magnetron sputter deposition, Solid electrolyte, Solid-state batteries
Journal
JOURNAL OF POWER SOURCES
Volume 307, Issue -, Pages 684-689
Publisher
Elsevier BV
Online
2016-02-02
DOI
10.1016/j.jpowsour.2015.12.054

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