Article
Chemistry, Multidisciplinary
Ju-Ah Lee, Jongwon Yoon, Seungkwon Hwang, Hyunsang Hwang, Jung-Dae Kwon, Seung-Ki Lee, Yonghun Kim
Summary: Two-dimensional transition-metal dichalcogenides (TMDs) materials, such as molybdenum disulfide (MoS2), have outstanding electrical properties and atomically thin layered structure, making them a potential main material for future high-performance logic circuits. However, local back-gate-based MoS2 transistors on a silicon substrate can degrade electrical characteristics. The use of buried-gate-based MoS2 transistors, where the gate electrodes are embedded into the silicon substrate, significantly enhances various device parameters and allows for the fabrication of integrated logic circuits.
Article
Chemistry, Physical
Zheng Wei, Jian Tang, Xuanyi Li, Zhen Chi, Yu Wang, Qinqin Wang, Bo Han, Na Li, Biying Huang, Jiawei Li, Hua Yu, Jiahao Yuan, Hailong Chen, Jiatao Sun, Lan Chen, Kehui Wu, Peng Gao, Congli He, Wei Yang, Dongxia Shi, Rong Yang, Guangyu Zhang
Summary: This study achieved uniform oxygen doping of wafer-scale monolayer MoS2 and found a reduction in bandgaps with increased oxygen-doping levels. Devices fabricated based on these doped MoS2 monolayers demonstrated excellent electronic performances, showing promise for their potential large-scale applications in electronics.
Article
Multidisciplinary Sciences
Myungjae Lee, Hanyu Hong, Jaehyung Yu, Fauzia Mujid, Andrew Ye, Ce Liang, Jiwoong Park
Summary: This paper reports three-atom-thick waveguides, called delta waveguides, based on wafer-scale molybdenum disulfide (MoS2) monolayers, which can guide visible and near-infrared light over millimeter-scale distances with low loss and efficient in-coupling. The extreme thinness of the waveguides enables a light-trapping mechanism similar to a delta-potential well in quantum mechanics, allowing for guided waves that propagate freely along the in-plane direction but are confined along the out-of-plane direction. The integration of thin-film optical components with delta waveguides demonstrates key functionalities essential for two-dimensional photonics.
Article
Crystallography
Zheng Wei, Xingdong Sun, Yongqing Cai, Yao Liang, Zhihua Zhang, Bo Chen
Summary: This study presents a significant breakthrough in the batch production of wafer-scale monolayer MoS2 via chemical vapor deposition, demonstrating the simultaneous growth of multiple wafers, homogeneity and cleanliness of the entire wafers, as well as consistency within a batch, and high-quality film fabrication. Additionally, the successful demonstration of batch production of wafer-scale oxygen-doped MoS2 films paves the way for the mass preparation of two-dimensional materials and accelerates their development for diverse applications.
Article
Chemistry, Multidisciplinary
Hyeong-U. Kim, Mansu Kim, Hyunho Seok, Kyu-Young Park, Ji-Yun Moon, Jonghwan Park, Byeong-Seon An, Hee Joon Jung, Vinayak P. Dravid, Dongmok Whang, Jae-Hyun Lee, Taesung Kim
Summary: A uniform wafer-scale synthesis of 1T-MoS2 film was achieved using a plasma-enhanced chemical vapor deposition system, showing enhanced catalytic activity. The plasma-containing highly reactive ions and radicals of the sulfurization precursor enabled the low-temperature synthesis of 1T-MoS2 catalyst.
Review
Chemistry, Multidisciplinary
Jingyi Hu, Fan Zhou, Jialong Wang, Fangfang Cui, Wenzhi Quan, Yanfeng Zhang
Summary: 2D semiconducting transition metal dichalcogenides (TMDCs), with a formula of MX2 (M=Mo, W; X=S, Se, etc.), have potential applications as channel materials for integrated circuits due to their dangling-bond-free surfaces, moderate bandgaps, and high carrier mobilities. Chemical vapor deposition (CVD) is recognized as the most promising method for preparing wafer-scale 2D MX2 films. This review summarizes the recent progress in CVD syntheses of wafer-scale 2D MX2 films and their applications in logic operations, data storage, and image capturing/processing related fields, as well as the challenges and prospects in controlled synthesis, reliable characterization, and damage-free transfer of 2D MX2 and the fabrication and integration of high-performance devices.
ADVANCED FUNCTIONAL MATERIALS
(2023)
Article
Chemistry, Multidisciplinary
Michal Macha, Hyun Goo Ji, Mukesh Tripathi, Yanfei Zhao, Mukeshchand Thakur, Jing Zhang, Andras Kis, Aleksandra Radenovic
Summary: By adapting efficient monolayer growth methodologies from tube-furnace systems to vertical-showerhead geometries, and combining gas-phase precursor supply with unique tube-furnace approaches, we have achieved large-area, high-quality thin film synthesis.
NANOSCALE ADVANCES
(2022)
Article
Physics, Applied
Vaidotas Miseikis, Camilla Coletti
Summary: Graphene has been proposed as a material to drive the continuous growth of the telecommunications industry, but overcoming the challenges of scalable graphene integration is necessary for widespread adoption. Recent technological advances have presented opportunities to address these challenges.
APPLIED PHYSICS LETTERS
(2021)
Article
Nanoscience & Nanotechnology
Sumin Hwangbo, Luhing Hu, Anh Tuan Hoang, Jae Yong Choi, Jong-Hyun Ahn
Summary: This paper presents a novel fabrication method for the integration of transition metal dichalcogenides with compound semiconductors, which is compatible with a batch microfabrication process. The authors demonstrate the synthesis of a thin film of molybdenum disulfide on a gallium-nitride-based epitaxial wafer, which is then used to form a thin film transistor array. This transistor array is subsequently integrated with micro-light-emitting-diode devices to create an active matrix micro-LED display. The authors also show a simple approach for obtaining red and green colors through the printing of quantum dots on a blue micro-LED, enabling the scalable fabrication of full-color micro-LED displays.
NATURE NANOTECHNOLOGY
(2022)
Article
Chemistry, Multidisciplinary
Xiangming Xu, Tianchao Guo, Mrinal K. Hota, Hyunho Kim, Dongxing Zheng, Chen Liu, Mohamed Nejib Hedhili, Rajeh S. Alsaadi, Xixiang Zhang, Husam N. Alshareef
Summary: This study demonstrates the potential of solution-processed Ti3C2Tx MXene films in large-area 2D nanoelectronics and successfully integrates them into MoS2 transistor circuits, achieving high yield and stable performance.
ADVANCED MATERIALS
(2022)
Article
Chemistry, Physical
Pengfei Yang, Fachen Liu, Xuan Li, Jingyi Hu, Fan Zhou, Lijie Zhu, Qing Chen, Peng Gao, Yanfeng Zhang
Summary: To meet industry needs, a high-reproducible, high-efficient method for large-scale production of single-crystal monolayer TMDs is proposed. The epitaxial growth of wafer-scale monolayer MoS2 single crystals on sapphire substrates is achieved through a designed precursor supply route, precursor concentration decay strategy, and precise optimization of chalcogenides and metal precursor ratio. This research demonstrates a reliable route for batch production of wafer-scale single-crystal 2D materials, promoting their practical applications in high-performance nanoelectronics and optoelectronics.
Article
Materials Science, Multidisciplinary
Sina Saravi, Thomas Pertsch, Frank Setzpfandt
Summary: Lithium niobate is one of the most suitable material platforms for integrated optical quantum circuits, with recent advancements in nanostructuring technology. The LNOI platform, with its advanced nanostructuring technology and favorable material properties, has the potential to be a strong contender for large-scale optical quantum circuits.
ADVANCED OPTICAL MATERIALS
(2021)
Review
Chemistry, Multidisciplinary
Linjuan Wang, Sandra Elizabeth Saji, Lingjun Wu, Zixuan Wang, Zijian Chen, Yaping Du, Xue-feng Yu, Haitao Zhao, Zongyou Yin
Summary: The development of advanced electronic devices is driving various aspects of modern technology and industry. This paper provides a detailed overview of the synthesis strategies of 2D metal organic frameworks (MOFs) that are gaining increasing attention, serving as a basis for expanding the use of novel key materials in electrical devices and integrated circuits. The synthesis methods of 2D MOFs are summarized and discussed in depth, along with the illustrations of promising applications in various electrical devices and integrated circuits.
Article
Engineering, Electrical & Electronic
Joshua T. West, Arthur Kurlej, Alex Wynn, Chad Rogers, Mark A. Gouker, Sergey K. Tolpygo
Summary: This study used a fully automated cryogenic wafer prober to measure superconductor fabrication process control monitors and simple integrated circuits on 200-mm wafers at 4.4 K. The goal was to demonstrate the feasibility of using the system for characterizing niobium superconducting devices and integrated circuits on a wafer scale. The results showed wafer-scale distributions of various properties and compared them with existing models.
IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY
(2022)
Article
Chemistry, Multidisciplinary
Xinyu Wang, Xinyu Chen, Jingyi Ma, Saifei Gou, Xiaojiao Guo, Ling Tong, Junqiang Zhu, Yin Xia, Die Wang, Chuming Sheng, Honglei Chen, Zhengzong Sun, Shunli Ma, Antoine Riaud, Zihan Xu, Chunxiao Cong, Zhijun Qiu, Peng Zhou, Yufeng Xie, Lifeng Bian, Wenzhong Bao
Summary: This article introduces the fabrication of MoS2 field-effect transistors with consistent performance using a 4-inch high-quality monolayer MoS2 film, and explores the design and fabrication of basic circuits and more complex logic circuits.
ADVANCED MATERIALS
(2022)
