Unified theory of silicon carbide oxidation based on the Si and C emission model

Published 2016 View Full Article

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Title
Unified theory of silicon carbide oxidation based on the Si and C emission model
Authors
Keywords
-
Journal
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 49, Issue 22, Pages 225103
Publisher
IOP Publishing
Online
2016-05-06
DOI
10.1088/0022-3727/49/22/225103

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