Thermally stable yttrium–scandium oxide high-kdielectrics deposited by a solution process

Published 2016 View Full Article

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Title
Thermally stable yttrium–scandium oxide high-kdielectrics deposited by a solution process
Authors
Keywords
-
Journal
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 49, Issue 11, Pages 115109
Publisher
IOP Publishing
Online
2016-02-18
DOI
10.1088/0022-3727/49/11/115109

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