Tribological development of TiCN coatings by adjusting the flowing rate of reactive gases

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Title
Tribological development of TiCN coatings by adjusting the flowing rate of reactive gases
Authors
Keywords
Thin film, Microstructure, Tribology, Reactive sputtering
Journal
JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS
Volume 90, Issue -, Pages 45-53
Publisher
Elsevier BV
Online
2015-11-19
DOI
10.1016/j.jpcs.2015.11.009

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