Enhanced Depth Profiling of Perovskite Oxide: Low Defect Levels Induced in SrTiO3 by Argon Cluster Sputtering

Published 2016 View Full Article

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Title
Enhanced Depth Profiling of Perovskite Oxide: Low Defect Levels Induced in SrTiO3 by Argon Cluster Sputtering
Authors
Keywords
-
Journal
Journal of Physical Chemistry C
Volume 120, Issue 38, Pages 21358-21363
Publisher
American Chemical Society (ACS)
Online
2016-09-01
DOI
10.1021/acs.jpcc.6b04007

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