Atomic-Scale Mapping of Layer-by-Layer Hydrogen Etching and Passivation of SiC(0001) Substrates

Published 2016 View Full Article

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Title
Atomic-Scale Mapping of Layer-by-Layer Hydrogen Etching and Passivation of SiC(0001) Substrates
Authors
Keywords
-
Journal
Journal of Physical Chemistry C
Volume 120, Issue 19, Pages 10361-10367
Publisher
American Chemical Society (ACS)
Online
2016-04-20
DOI
10.1021/acs.jpcc.6b01493

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