Atomic Layer Deposition of Silicon Dioxide Using Aminosilanes Di-sec-butylaminosilane and Bis(tert-butylamino)silane with Ozone

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Title
Atomic Layer Deposition of Silicon Dioxide Using Aminosilanes Di-sec-butylaminosilane and Bis(tert-butylamino)silane with Ozone
Authors
Keywords
-
Journal
Journal of Physical Chemistry C
Volume 120, Issue 20, Pages 10927-10935
Publisher
American Chemical Society (ACS)
Online
2016-05-04
DOI
10.1021/acs.jpcc.6b01803

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