Etching Silicon with Aqueous Acidic Ozone Solutions: Reactivity Studies and Surface Investigations

Published 2016 View Full Article

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Title
Etching Silicon with Aqueous Acidic Ozone Solutions: Reactivity Studies and Surface Investigations
Authors
Keywords
-
Journal
Journal of Physical Chemistry C
Volume 120, Issue 39, Pages 22349-22357
Publisher
American Chemical Society (ACS)
Online
2016-08-16
DOI
10.1021/acs.jpcc.6b06332

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