Toward Atomic-Scale Patterned Atomic Layer Deposition: Reactions of Al2O3 Precursors on a Si(001) Surface with Mixed Functionalizations

Published 2016 View Full Article

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Title
Toward Atomic-Scale Patterned Atomic Layer Deposition: Reactions of Al2O3 Precursors on a Si(001) Surface with Mixed Functionalizations
Authors
Keywords
-
Journal
Journal of Physical Chemistry C
Volume 120, Issue 5, Pages 2628-2641
Publisher
American Chemical Society (ACS)
Online
2016-01-20
DOI
10.1021/acs.jpcc.5b09053

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