Article
Chemistry, Physical
Xiaochuan Deng, Rui Liu, Songjun Li, Ling Li, Hao Wu, Xuan Li
Summary: The proposed FS-TMOS features a fin-shaped gate and integrated Schottky diode design to improve performance, while utilizing the SPS shield to suppress excessive electric field. Compared to C-TMOS, FS-TMOS has significantly lower performance metrics and demonstrates superior robustness in short-circuit and avalanche tests. Overall, FS-TMOS is a promising candidate for next-generation high efficiency and high-power density applications.
Article
Computer Science, Information Systems
Nilesh Kumar Jaiswal, V. N. Ramakrishnan
Summary: This work presents a vertical GaN parallel split gate trench MOSFET (PSGT-MOSFET) device architecture for power conversion applications. The device features two parallel gates and a field plate connected to the gate and source, respectively. TCAD simulation results show that the PSGT-MOSFET has a lower peak electric field and switching losses compared to a conventional TG-MOSFET.
Article
Engineering, Electrical & Electronic
Yongjian Ma, Xuanze Zhou, Wenbo Tang, Xiaodong Zhang, Guangwei Xu, Li Zhang, Tiwei Chen, Shige Dai, Chunxu Bian, Botong Li, Zhongming Zeng, Shibing Long
Summary: In this work, a high-performance beta-Ga2O3 U-shaped trench-gate metal-oxide-semiconductor field-effect transistor (UMOSFET) was demonstrated. Nitrogen ions were used to create a current blocking layer, which allowed electrons to accumulate near the U-shaped groove and form a conductive channel, promoting current generation. By modulating the concentration of implanted nitrogen ions, a UMOSFET with an applicable threshold voltage of 4.2 V was achieved. When the N ions concentration was 5 x 10^18 cm^-3, a high current density of 702.3 A/cm^2, a low on-resistance of 10.4 m Omega.cm^2, and a decent breakdown voltage of 455 V (at V_G =0 V) were obtained. The UMOSFET in this study offers great advantages in the fabrication of high-performance E-mode vertical beta-Ga2O3 MOSFETs and facilitates the development of beta-Ga2O3 power electronics devices.
IEEE ELECTRON DEVICE LETTERS
(2023)
Article
Chemistry, Multidisciplinary
Yuwen Huang, Xiaoping Xie, Zeyulin Zhang, Peng Dong, Zhe Li, Dazheng Chen, Weidong Zhu, Shenglei Zhao, Qian Feng, Jincheng Zhang, Chunfu Zhang, Yue Hao
Summary: The use of p-type oxide as the current-blocking layer in the vertical heterojunction Ga2O3 MOSFET greatly improves device performance. By adjusting the doping concentration and thickness, the threshold voltage and breakdown voltage can be modified. Furthermore, other p-type oxides show promising performances as well.
APPLIED SCIENCES-BASEL
(2022)
Article
Nanoscience & Nanotechnology
Zhongyunshen Zhu, Johannes Svensson, Adam Jonsson, Lars-Erik Wernersson
Summary: This study demonstrates that the performance of GaSb-based devices can be improved through rapid thermal annealing, making them suitable for low-power logic applications and RF applications.
Article
Crystallography
Jian-Sian Li, Hsiao-Hsuan Wan, Chao-Ching Chiang, Fan Ren, Stephen J. Pearton
Summary: The stability of vertical geometry NiO/Ga2O3 rectifiers was examined under two types of annealing. It was found that annealing at 300 degrees C resulted in the best performance, including maximizing breakdown voltage and on-off ratio, lowering forward turn-on voltage, reducing reverse leakage current, and maintaining on resistance. The surface morphology remained smooth and the NiO exhibited a bandgap of 3.84 eV with an almost unity Ni2O3/NiO composition.
Review
Engineering, Multidisciplinary
Xiaoqing Chen, Feng Li, Herbert L. Hess
Summary: This paper provides a comprehensive review of the recent progress in trench gate beta-Ga2O3 MOSFETs, including vertical and planar MOSFET structures. Material properties, crystal growth, device design and fabrication process, as well as the performance of various trench gate beta-Ga2O3 MOSFETs are discussed.
ENGINEERING RESEARCH EXPRESS
(2023)
Article
Engineering, Electrical & Electronic
Ke Zeng, Rohith Soman, Zhengliang Bian, Seungbin Jeong, Srabanti Chowdhury
Summary: The lack of an effective current blocking layer in Ga2O3 has been a major barrier to achieving a vertical MOSFET. However, a selective diffusion doping technique utilizing magnesium-doped spin-on-glass has been used to form a current blocking layer, leading to the successful demonstration of a vertical Ga2O3 MOSFET for the first time.
IEEE ELECTRON DEVICE LETTERS
(2022)
Article
Engineering, Electrical & Electronic
Dong Fang, Guang Yang, Ming Qiao, Kui Xiao, Xiangyu Yang, Zheng Bian, Bo Zhang
Summary: The proposed inverted L-shaped source region (ILS) structure significantly reduces gate to source capacitance and achieves relatively low gate charge, while maintaining specific on-resistance almost unchanged, resulting in a significant reduction in figure of merit.
MICROELECTRONICS JOURNAL
(2022)
Article
Engineering, Electrical & Electronic
Jun Tsunoda, Masayuki Iwataki, Kiyotaka Horikawa, Shotaro Amano, Kosuke Ota, Atsushi Hiraiwa, Hiroshi Kawarada
Summary: Diamond p-channel field-effect transistors (p-FETs) play a crucial role in improving CMOS technology, and this study presents a vertical-type diamond trench MOSFET with a trench gate structure that achieves high performance and current operation, potentially suitable for complementary inverters of the future generation.
IEEE TRANSACTIONS ON ELECTRON DEVICES
(2021)
Article
Engineering, Multidisciplinary
Yunfei Zhang, Suzhen Luan
Summary: This article proposes a gate-mesa trench (GMT) beta-Ga2O3 metal-oxide-semiconductor field-effect transistor (MOSFET) device with enhanced performance and improved breakdown voltage. Compared to the gate-field plate trench (GFPT), the GMT device shows higher breakdown voltage and power figure of merit (PFOM), demonstrating excellent device performance. The use of high dielectric constant HfO2 dielectric and gate oxide Al2O3 is found to significantly improve the performance of the device.
ENGINEERING RESEARCH EXPRESS
(2023)
Article
Engineering, Electrical & Electronic
Bo Yi, Song Zhang, ZhiNing Zhang, JunJi Cheng, HaiMeng Huang, MouFu Kong, HongQiang Yang
Summary: In this paper, a novel junction-less Ga2O3 MISFET with a p-GaN gate is proposed. By setting a heavily doped thin layer p-GaN in the trench gate region, the n-Ga2O3 channel region can be deeply depleted, leading to a high threshold voltage and breakdown voltage. Analytical modeling and TCAD simulations show that the proposed MISFET exhibits a higher threshold voltage than conventional junction-less Ga2O3 MISFETs. Additionally, the breakdown voltage of the proposed MISFET is higher than that of conventional junction-less Ga2O3 MISFETs due to the enhanced electric field at the corner of the trench gate.
SEMICONDUCTOR SCIENCE AND TECHNOLOGY
(2023)
Article
Physics, Applied
Sandeep Kumar, Hisashi Murakami, Yoshinao Kumagai, Masataka Higashiwaki
Summary: This study presents vertical Ga2O3 Schottky barrier diodes (SBDs) with a staircase field plate on a deep trench filled with SiO2, which effectively alleviates electric field concentration in the Ga2O3 drift layer and the SiO2 layer at high reverse voltage operation. The Ga2O3 SBDs demonstrate superior device characteristics with low on-resistance and high off-state breakdown voltage.
APPLIED PHYSICS EXPRESS
(2022)
Article
Engineering, Electrical & Electronic
Jie Ma, Long Zhang, Jing Zhu, Wangming Cui, Weifeng Sun, Feiming Huang, Yan Gu, Sen Zhang, Nailong He
Summary: This article investigates the gate voltage overshoot during the turn-on transient in the trench gate U-shaped (TGU) channel silicon-on-insulator lateral insulated gate bipolar transistor (SOI-LIGBT) and proposes novel structures for the first time with numerical simulation. The novel structures can suppress hole accumulation, slow down the rise of electric potential near G(2), lower di/dt, and shield the displacement current effectively. Compared with the conventional TGU structure, the di/dt of the Novel-2 is improved by 56.3% at the same E-ON of 2.4 mJ/cm(2).
IEEE TRANSACTIONS ON ELECTRON DEVICES
(2021)
Article
Engineering, Electrical & Electronic
Ming Qiao, Tao Ma, Shida Dong, Zhengkang Wang, Shuhao Zhang, Zhaoji Li, Bo Zhang
Summary: A high-performance field-plate trench MOSFET with a hollow split gate structure is proposed in this paper. By reducing the overlap of the control gate to the split gate, the parasitic gate capacitance and gate charge are significantly reduced without altering the control gate structure. Numerical simulation results show that the proposed device can reduce gate-source charge and gate charge while maintaining breakdown voltage and specific on-resistance. Moreover, the average total power loss of the proposed device is reduced compared to the conventional one.
MICROELECTRONICS JOURNAL
(2022)
Article
Chemistry, Multidisciplinary
Jinyang Liu, Qingqing Huang, Yongqian Qian, Zhigao Huang, Fachun Lai, Limei Lin, Mingzhu Guo, Weifeng Zheng, Yan Qu
CRYSTAL GROWTH & DESIGN
(2016)
Article
Chemistry, Multidisciplinary
Jinyang Liu, Chuandong Zuo, Limei Lin, Yangyang Xu, Weifeng Zheng, Yan Qu, Fachun Lai, Zhigao Huang
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY
(2016)
Article
Engineering, Electrical & Electronic
Miaoju Wu, Guilin Chen, Xiaoping Wu, Jifu Zhao, Limei Lin, Jinyang Liu, Weihuang Wang, Fachun Lai
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
(2016)
Article
Chemistry, Multidisciplinary
Jinyang Liu, Yangyang Xu, Hongbing Cai, Chuandong Zuo, Zhigao Huang, Limei Lin, Xiaomin Guo, Zhendong Chen, Fachun Lai
Article
Energy & Fuels
Ruihua Yang, Jinyang Liu, Limei Lin, Yan Qu, Weifeng Zheng, Fachun Lai
Article
Physics, Condensed Matter
Guilin Chen, Miaoju Wu, Weihuang Wang, Jin Zhang, Limei Lin, Jinyang Liu, Fachun Lai
SUPERLATTICES AND MICROSTRUCTURES
(2016)
Article
Chemistry, Physical
Limei Lin, Jinyang Liu, Jing Lv, Shuangjuan Shen, Xiaoping Wu, Daochu Wu, Yan Qu, Weifeng Zheng, Fachun Lai
JOURNAL OF ALLOYS AND COMPOUNDS
(2017)
Article
Nanoscience & Nanotechnology
Jinyang Liu, Qingqing Huang, Kun Zhang, Yangyang Xu, Mingzhu Guo, Yongqiang Qian, Zhigao Huang, Fachun Lai, Limei Lin
NANOSCALE RESEARCH LETTERS
(2017)
Article
Materials Science, Coatings & Films
Xiaoping Wu, Jinyang Liu, Pingping Huang, Zhigao Huang, Fachun Lai, Guilin Chen, Limei Lin, Peiwei Lv, Weifeng Zheng, Yan Qu
SURFACE ENGINEERING
(2017)
Article
Nanoscience & Nanotechnology
Jinyang Liu, Qingqing Huang, Kun Zhang, Yangyang Xu, Mingzhu Guo, Yongqiang Qian, Zhigao Huang, Fachun Lai, Limei Lin
NANOSCALE RESEARCH LETTERS
(2017)
Article
Chemistry, Multidisciplinary
Jinyang Liu, Yuhan Zhou, Yichun Liang, Mengyu Liu, Zhigao Huang, Limei Lin, Weifeng Zheng, Fachun Lai
Article
Nanoscience & Nanotechnology
Jinyang Liu, Yuhan Zhou, Yue Lin, Mingling Li, Hongbing Cai, Yichun Liang, Mengyu Liu, Zhigao Huang, Fachun Lai, Feng Huang, Weifeng Zheng
ACS APPLIED MATERIALS & INTERFACES
(2019)
Article
Chemistry, Multidisciplinary
Yangyang Xu, Jinyang Liu, Chuandong Zuo, Hongbing Cai, Ping Wu, Zhigao Huang, Fachun Lai, Limei Lin, Weifeng Zheng, Yan Qu
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY
(2019)
Article
Nanoscience & Nanotechnology
Jinyang Liu, Mingling Li, Mengyu Liu, Hongbing Cai, Yue Lin, Yuhan Zhou, Zhigao Huang, Fachun Lai
ACS APPLIED MATERIALS & INTERFACES
(2020)