Preparation of Mg-Doped Colloidal Silica Abrasives and Their Chemical Mechanical Polishing Performances on Sapphire

Published 2016 View Full Article

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Title
Preparation of Mg-Doped Colloidal Silica Abrasives and Their Chemical Mechanical Polishing Performances on Sapphire
Authors
Keywords
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Journal
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY
Volume 16, Issue 9, Pages 9951-9957
Publisher
American Scientific Publishers
Online
2016-08-07
DOI
10.1166/jnn.2016.12326

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