Journal
JOURNAL OF MICROSCOPY
Volume 264, Issue 2, Pages 143-152Publisher
WILEY
DOI: 10.1111/jmi.12422
Keywords
Fractal analysis; hot filament chemical vapour deposition; nanocrystaline diamond; three-dimensional surface micromorphology
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This paper analyses the three-dimensional (3-D) surface texture of growing diamond nanocrystals on Au thin films as catalyst on p-type Si substrate using hot filament chemical vapour deposition (HFCVD). Rutherford backscattering spectrometry (RBS), atomic force microscopy (AFM), Raman, X-ray diffraction (XRD) and scanning electron microscopy (SEM) analyses were applied also to characterize the 3-D surface texture data in connection with the statistical, and fractal analyses. This type of 3-D morphology allows a deeper understanding of structure/property relationships and surface defects in prepared samples. Our results indicate a promising way for preparing high-quality diamond nanocrystals on Au thin films as catalyst on p-type Si substrate via HFCVD method. Lay description This paper analyses the three-dimensional (3-D) surface texture of growing diamond nano-crystals on Au thin films as catalyst on P type Si substrate using Hot Filament Chemical Vapor Deposition (HFCVD). Rutherford Backscattering Spectrometry (RBS), Atomic Force Microscopy (AFM), Raman, X-Ray Diffraction (XRD) and Scanning Electron Microscopy (SEM) analyses were applied also to characterize the 3-D surface texture data in connection with the statistical, and fractal analyses. This type of 3-D morphology allows a deeper understanding of structure/property relationships and surface defects in prepared samples. Our results indicate a promising way for preparing high-quality diamond nano-crystals on Au thin films as catalyst on p-type Si substrate via HFCVD method.
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