Computer numerical control (CNC) lithography: light-motion synchronized UV-LED lithography for 3D microfabrication

Title
Computer numerical control (CNC) lithography: light-motion synchronized UV-LED lithography for 3D microfabrication
Authors
Keywords
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Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 26, Issue 3, Pages 035003
Publisher
IOP Publishing
Online
2016-01-27
DOI
10.1088/0960-1317/26/3/035003

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