Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 26, Issue 3, Pages -Publisher
IOP PUBLISHING LTD
DOI: 10.1088/0960-1317/26/3/037001
Keywords
nanopore; gold; dewetting; SiRN oxidation; SiON
Categories
Funding
- NanoNextNL, a micro and nano technology consortium of the Government of the Netherlands
Ask authors/readers for more resources
We report the fabrication of nanopores in a silicon oxynitride (SiON) membrane by heating a silicon rich -silicon nitride (SiRN) membrane with a gold nanoparticle array deposited on its surface. The gold nanoparticle array was realized by photolithography and the membrane by wet -etching. The entire process is wafer scale. Nanopore through -holes of an average diameter of 150nm were produced in a -22 tun thick membrane. Membranes and nanopores were characterized by atomic force microscopy, scanning transmission electron microscopy, and x-ray photo -electron spectrocopy.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available