Journal
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 25, Issue 1, Pages 144-152Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JMEMS.2015.2499167
Keywords
Pressure measurement; electrochemical device; impedance-based sensing; Parylene C; electrochemical-microelectromechanical systems (EC-MEMS)
Categories
Funding
- National Science Foundation through the Division of Electrical, Communications, and Cyber Systems [ECCS-1231994]
- Directorate For Engineering
- Div Of Electrical, Commun & Cyber Sys [1231994] Funding Source: National Science Foundation
- Emerging Frontiers & Multidisciplinary Activities
- Directorate For Engineering [1332394] Funding Source: National Science Foundation
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A novel pressure transducer concept is introduced in which external pressure variations induce changes in the volume of a trapped microbubble (mu B) in an electrolyte solution. These volumetric changes are monitored by electrochemical impedance-based measurements and may be used for pressure tracking applications. Microbubbles are nucleated on-demand by electrolysis within a confinement chamber with high precision (measured size RSD similar to 1%). This pressure transducer concept was developed specifically for operation in liquid environments and features biocompatible construction, small footprint (<0.1 mm(2)), and low power consumption (<1 nW). This combination of features is ideal for in vivo pressure monitoring applications. [2015-0203]
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