Electrostatic Micro-Hydraulic Systems

Published 2016 View Full Article

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Title
Electrostatic Micro-Hydraulic Systems
Authors
Keywords
-
Journal
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 25, Issue 3, Pages 557-569
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2016-05-07
DOI
10.1109/jmems.2016.2552141

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