SiOx and SiOxCzHw mono- and multi-layer deposits for improved polymer oxygen and water vapor barrier properties

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Title
SiOx and SiOxCzHw mono- and multi-layer deposits for improved polymer oxygen and water vapor barrier properties
Authors
Keywords
Plasma deposition, Surface analysis, Monolayer and multilayer deposition, Oxygen barrier properties, Water vapor barrier properties
Journal
JOURNAL OF MEMBRANE SCIENCE
Volume 500, Issue -, Pages 245-254
Publisher
Elsevier BV
Online
2015-11-29
DOI
10.1016/j.memsci.2015.11.040

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