Design and experimental evaluation of an inchworm motor driven by bender-type piezoelectric actuators

Temperature-dependent asymmetric Prandtl-Ishlinskii hysteresis model for piezoelectric actuators

(2022) Marc Savoie et al.   Smart Materials and Structures

Electron microscopy in semiconductor inspection

(2021) Koji Nakamae   MEASUREMENT SCIENCE and TECHNOLOGY

A walker-pusher inchworm actuator driven by two piezoelectric stacks

(2021) Xuefeng Ma et al.   MECHANICAL SYSTEMS AND SIGNAL PROCESSING

Modeling of Motion Characteristics and Performance Analysis of an Ultra-Precision Piezoelectric Inchworm Motor

(2020) Bo Zhao et al.   Materials

Design and experimental verification of a bolt-clamped piezoelectric actuator based on clamping and driving mechanism

(2020) Liang Wang et al.   MECHANICAL SYSTEMS AND SIGNAL PROCESSING

A Novel Piezoelectric Inchworm Actuator Driven by One Channel Direct Current Signal

(2020) Renming Wang et al.   IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS

Development of a two-DOF inertial rotary motor using a piezoelectric actuator constructed on four bimorphs

(2020) Shijing Zhang et al.   MECHANICAL SYSTEMS AND SIGNAL PROCESSING

Design, analysis, experiments and kinetic model of a high step efficiency piezoelectric actuator

(2019) Jiru Wang et al.   MECHATRONICS

A stick-slip/inchworm hybrid rotary piezo motor based on a symmetric triangular driving mechanism

(2019) Yangkun Zhang et al.   APPLIED PHYSICS LETTERS

An Overview of Piezoelectric Self-Sensing Actuation for Nanopositioning Applications: Electrical Circuits, Displacement, and Force Estimation

(2019) Joel Bafumba Liseli et al.   IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT

A novel high performance integrated two-axis inchworm piezoelectric motor

(2019) Mohammad Tahmasebipour et al.   Smart Materials and Structures

Development of a Small Two-Dimensional Robotic Spherical Joint Using a Bonded-Type Piezoelectric Actuator

(2019) Xiang Gao et al.   IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS

Precise Position Tracking Control with an Improved Transient Performance for a Linear Piezoelectric Ceramic Motor

(2018) Alireza Safa et al.   IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS

Precision Position Tracking for Piezoelectric-Driven Motion System using Continuous Third-Order Sliding Mode Control

(2018) Jyoti Prakash Mishra et al.   IEEE-ASME TRANSACTIONS ON MECHATRONICS

New design for inertial piezoelectric motors

(2018) Lige Liu et al.   REVIEW OF SCIENTIFIC INSTRUMENTS

Gain Scheduling Control of a Walking Piezo Actuator

(2013) Roel J. E. Merry et al.   IEEE-ASME TRANSACTIONS ON MECHATRONICS

Modeling and Waveform Optimization of a Nano-motion Piezo Stage

(2010) R J E Merry et al.   IEEE-ASME TRANSACTIONS ON MECHATRONICS

Using a Walking Piezo Actuator to Drive and Control a High-Precision Stage

(2009) Roel J. E. Merry et al.   IEEE-ASME TRANSACTIONS ON MECHATRONICS

Design, operation, and motion characteristics of a precise piezoelectric linear motor

(2009) King-Fu Hii et al.   PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY