Measurements and interpretation of EEDF in a discharge with a hollow cathode in helium: effect of the measuring probe and the anode on the form of the distribution function

Title
Measurements and interpretation of EEDF in a discharge with a hollow cathode in helium: effect of the measuring probe and the anode on the form of the distribution function
Authors
Keywords
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Journal
PLASMA SOURCES SCIENCE & TECHNOLOGY
Volume 31, Issue 10, Pages 105016
Publisher
IOP Publishing
Online
2022-10-05
DOI
10.1088/1361-6595/ac9750

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