Silicon Photonics R&D and Manufacturing on 300-mm Wafer Platform

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Title
Silicon Photonics R&D and Manufacturing on 300-mm Wafer Platform
Authors
Keywords
-
Journal
JOURNAL OF LIGHTWAVE TECHNOLOGY
Volume 34, Issue 2, Pages 286-295
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2015-09-24
DOI
10.1109/jlt.2015.2481602

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