Journal
OPTICS EXPRESS
Volume 30, Issue 19, Pages 34064-34076Publisher
Optica Publishing Group
DOI: 10.1364/OE.467865
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Funding
- State Key Laboratory of Mining Disaster Prevention and Control, Shandong University of Science and Technology [MDPC201602, MDPC2022ZR04]
- Department of Education of Shandong Province [J06P14]
- Qingdao Feibo Technology Co., Ltd [02040102401]
- Postdoctoral Research Foundation of China [20080441150, 200902574]
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This study investigates a soft highly sensitive tactile sensor based on an in-fiber interferometer embedded in a polydimethylsiloxane (PDMS) structure. Experimental results show that different order sensing modes have different sensing performance, and the sensor exhibits excellent stability and response time.
A soft highly sensitive tactile sensor based on an in-fiber interferometer embedded in polydimethylsiloxane (PDMS) structure is studied. Theoretical simulation obtains that the high order sensing modes and PDMS can improve the sensitivity. Experiments show that different order sensing modes, derived by fast Fourier transform (FFT) and inverse FFT methods, present different sensing performance. Corresponding to high order mode, 1.3593 nm/kPa sensitivity and 37 Pa (0.015 N) detection limit is obtained. Meanwhile, it also shows very good stability, reproducibility, and response time. This study not only demonstrates a tactile sensor with high sensitivity but also provides a novel sensing modes analysis method. (c) 2022 Optica Publishing Group under the terms of the Optica Open Access Publishing Agreement
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