A numerical modeling approach to estimate the piezoresistance of diffused resistors with experimental validation

Biomedical Catheters With Integrated Miniature Piezoresistive Pressure Sensors: A Review

(2021) K. V. Meena et al.   IEEE SENSORS JOURNAL

Silicon MEMS inertial sensors evolution over a quarter century

(2021) G Langfelder et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Eccentric reflective optical fiber MEMS micro-pressure sensor

(2020) Bian Tian et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Polymer/Ceramic MEMS: A Nanomechanical Sensor Platform With Low Temperature High Gauge Factor ITO for Electromechanical Transduction

(2020) B. S. Tina et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

Switching performance of bistable membranes activated with integrated piezoelectric thin film transducers

(2019) M Dorfmeister et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Optimization of a nano-cantilever biosensor for reduced self-heating effects and improved performance metrics

(2018) Ribu Mathew et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Piezoresistive silicon nanowire resonators as embedded building blocks in thick SOI

(2018) Mohammad Nasr Esfahani et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Performance comparison of a single element piezoresistor with a half-active Wheatstone bridge for miniaturized pressure sensors

(2017) K.V. Meena et al.   MEASUREMENT

Design of a triangular platform piezoresistive affinity microcantilever sensor for biochemical sensing applications

(2015) Ribu Mathew et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Flexible tactile sensor for shear stress measurement using transferred sub-µm-thick Si piezoresistive cantilevers

(2012) Kentaro Noda et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Coupled effects of gold electroplating and electrochemical discharge machining processes on the performance improvement of a capacitive accelerometer

(2011) A. Ravi Sankar et al.   MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS

Design optimization of piezoresistive cantilevers for force sensing in air and water

(2009) Joseph C. Doll et al.   JOURNAL OF APPLIED PHYSICS

Piezoresistive Cantilever Performance—Part I: Analytical Model for Sensitivity

(2009) Sung-Jin Park et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

Cross-axis sensitivity reduction of a silicon MEMS piezoresistive accelerometer

(2008) A. Ravi Sankar et al.   MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS