4.6 Article

Nucleation of CVD-prepared hexagonal boron nitride on Ni(100), Ni(110) and Ni(111) surfaces: A theoretical study

Journal

VACUUM
Volume 205, Issue -, Pages -

Publisher

PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/j.vacuum.2022.111396

Keywords

Hexagonal boron nitride; Chemical vapor deposition; Nucleation; Transition metal surface; Density functional theory

Funding

  1. Innovation Scientists and Technicians Troop Construction Projects of Henan Province [CXTD2017089]
  2. Open Fund of Key Laboratory for Intelligent Nano Materials and Devices of the Ministry of Education [NJ2020003]
  3. High-performance grid computing platform of Henan Polytechnic University

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Density functional theory calculations were performed to investigate the nucleation process of hexagonal boron nitride (h-BN) on different metal surfaces. The results showed a geometry crossover from chain-like to honeycomb-like structures on all surfaces. The low index surface (100) was found to be more favorable for BN nucleation in the initial stage, while Ni(111) became the preferred surface as BN grew. The differences were mainly attributed to the metal atomic packing density, substrate symmetry, deformation of the BN clusters, and lattice mismatch between BN clusters and metal surfaces.
To understand the initial nucleation of hexagonal boron nitride (h-BN) prepared by chemical vapor deposition (CVD) on different surfaces, the stability of (BN)(n) (n = 1-12) clusters on Ni(100), Ni(110) and Ni(111) was systematically explored by density functional theory (DFT) calculations. Our results show that a geometry crossover from chain-like to honeycomb-like occurs on all three metal surfaces except that the critical dimension is different. The low index surface (100) is more suitable for BN nucleation in the initial stage, while Ni(111) becomes the preferred surface as BN grows. This difference is mainly attributed to the metal atomic packing density, the symmetry of the substrate, the deformation of the BN clusters, and the lattice mismatch between BN clusters and different metal surfaces. The synergistic effect ensures efficient charge transfer between the BN cluster and the underlying metal, which determines the nucleation of the BN cluster. In addition, the nucleation barrier and critical size of BN clusters can also be tuned by adjusting the ratio of B to N in the feedstock. These results should provide useful information for rational design of experimental conditions to obtain high-quality h-BN.

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