The role of surface kinetics on composition and quality of AlGaN

Published 2016 View Full Article

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Title
The role of surface kinetics on composition and quality of AlGaN
Authors
Keywords
A1. Growth models, A1. Surface kinetics, A3. Metalorganic chemical vapor deposition, B1. Nitrides
Journal
JOURNAL OF CRYSTAL GROWTH
Volume 451, Issue -, Pages 65-71
Publisher
Elsevier BV
Online
2016-07-02
DOI
10.1016/j.jcrysgro.2016.06.055

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