A parallel 3-DOF micro-nano motion stage for vibration-assisted milling

In this paper, the design, optimization, and application of a parallel three-degree-of-freedom micro-nano motion stage for vibration-assisted milling are reported. This stage is driven by the piezoelectric effect to achieve precise position adjustment. A compound differential branch chain is designed to solve the poor stiffness of traditional branch chains and large deflection errors. Mechanical properties of the stage are theoretically, numerically, and experimentally investigated. The output displacement and natural frequency are weighed by orthogonal optimization. The open-loop tests on the prototype showed the stage performance such as hysteresis, tracking, and decoupling. Milling of typical microstructure surfaces is employed to demonstrate the effectiveness of the stage.

Automated summary

This paper reports the design, optimization, and application of a parallel three-degree-of-freedom micro-nano motion stage for vibration-assisted milling. This stage is driven by the piezoelectric effect to achieve precise position adjustment. The design of a compound differential branch chain solves the stiffness and deflection error issues of traditional branch chains. The mechanical properties of the stage are investigated through theoretical, numerical, and experimental methods, and the output displacement and natural frequency are optimized through orthogonal optimization. Open-loop tests on the prototype demonstrate the performance of the stage, including hysteresis, tracking, and decoupling. The effectiveness of the stage is further demonstrated through milling of typical microstructure surfaces.