4.8 Article

Metasurface Micro/Nano-Optical Sensors: Principles and Applications

Journal

ACS NANO
Volume 16, Issue 8, Pages 11598-11618

Publisher

AMER CHEMICAL SOC
DOI: 10.1021/acsnano.2c03310

Keywords

micro; nano-optical sensor; metasurface; diffractive optical element; microcavity; photonic crystal; surface plasmon polariton; refractive index sensing; particle manipulation

Funding

  1. National Natural Science Foundation of China [61975026, 61875030]
  2. Suzhou Liveihood Science and Technology Program [SS2019024]
  3. Suzhou Basic Research Program [SJC2021012]
  4. Singapore Ministry of Education (MOE) Tier 3 grant [MOE2017-T3-1-001]
  5. Singapore National Research Foundation [MOH-000926]
  6. A*STAR [SERC A18A5b0056]
  7. Singapores National Water Agency [PUB-1804-0082]
  8. Fundamental Research Funds for the Central Universities
  9. UGC/RGC of the Hong Kong Special Administrative Region, China [AoE/P-502/20]
  10. Department of Science and Technology of Guangdong Province [2020B1515120073]
  11. Shenzhen Science and Technology Innovation Commission Grant [SGDX2019081623281169]

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Metasurfaces are 2D artificial materials that can manipulate light at the subwavelength scale. Compared to traditional micro/nano-optical sensors, Metasurfaces have better performance in label-free sensing and recognition of complex samples, and also have the advantage of high integration.
Metasurfaces are 2D artificial materials consisting of arrays of metamolecules, which are exquisitely designed to manipulate light in terms of amplitude, phase, and polarization state with spatial resolutions at the subwavelength scale. Traditional micro/nano-optical sensors (MNOSs) pursue high sensitivity through strongly localized optical fields based on diffractive and refractive optics, microcavities, and interferometers. Although detections of ultra-low concentrations of analytes have already been demonstrated, the label-free sensing and recognition of complex and unknown samples remain challenging, requiring multiple readouts from sensors, e.g., refractive index, absorption/emission spectrum, chirality, etc. Additionally, the reliability of detecting large, inhomogeneous biosamples may be compromised by the limited near-field sensing area from the localization of light. Here, we review recent advances in metasurface-based MNOSs and compare them with counterparts using micro-optics from aspects of physics, working principles, and applications. By virtue of underlying the physics and design flexibilities of metasurfaces, MNOSs have now been endowed with superb performances and advanced functionalities, leading toward highly integrated smart sensing platforms.

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