4.0 Article

Design and fabrication of an electrochemical chip for liquid-phase transmission electron microscopy

Journal

MICROSCOPY
Volume 71, Issue 4, Pages 238-241

Publisher

OXFORD UNIV PRESS
DOI: 10.1093/jmicro/dfac023

Keywords

MEMS; in situ; LP-TEM; electrochemical deposition; Zn; fabrication

Categories

Funding

  1. 'Nanotechnology Platform Project (Ultrafine Lithography Nano-measurement Center in The University of Tokyo d.lab)' of Ministry of Education, Culture, Sports, Science and Technology, Japan [JPMXP09F21UT0077, JPMXP09F20UT0093]

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This study reports a newly designed e-chip and its fabrication process for observing electrochemical reactions in a liquid using LP-TEM. Electrodes with desired shape were fabricated using shadow mask and vacuum deposition technology.
Liquid-phase transmission electron microscopy (LP-TEM) can be used with an electrochemical chip (e-chip) to observe electrochemical reactions in a liquid in situ. The design of electrodes on an e-chip fabricated using microelectromechanical system technology cannot be easily changed. Here, we report a newly designed e-chip and its fabrication process. Electrodes with a desired shape were fabricated with various metals via an additional step of vacuum deposition onto our e-chip with a shadow mask. For precise control of the electrochemical reactions in LP-TEM, optimization of the electrode shape and material is critical.

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