Investigation over effect of different carbon content on various properties of titanium carbon nitride (TiCN) coating grown on Si (100) substrate by chemical vapor deposition (CVD) process

In this work, chemically vapor deposited TiCN coating consists of crack network over the surface with higher C content due to the impingement of higher amount of nitrogen gas over it. The surface morphology analysis by AFM suggests that with higher C content particles distribution density of TiCN coating changes abruptly due to the presence of small or tiny particles in between large particles. Irrespective of C content the relation between R-a and indentation modulus is found to be nonlinear as 1-3% scattering being observed. The microstructure analysis by XRD confirms that the TiCN is multiphase material with the presence of crystalline phase at (111), (200) and (220) crystal planes and graphite phase at similar to 52 degrees. As the corrosion potential (E-corr values) has been shifted toward the negative side hence corrosion resistance of TiCN coating reduces with higher C content. The higher C content improves the crystal quality of TiCN coating as the peak position of different phonon modes are blue shifted. The mechanical property analysis suggests that with higher C content the preferred growth orientation has been formed and this ultimately improves the mechanical properties.

Automated summary

Chemically vapor deposited TiCN coating with crack network and higher C content was observed. The surface morphology analysis showed that the distribution density of particles changed abruptly with higher C content. XRD analysis confirmed that TiCN is a multiphase material with crystalline and graphite phases.