4.7 Article

Two dimensional Zirconium diselenide based humidity sensor for flexible electronics

Journal

SENSORS AND ACTUATORS B-CHEMICAL
Volume 358, Issue -, Pages -

Publisher

ELSEVIER SCIENCE SA
DOI: 10.1016/j.snb.2022.131507

Keywords

Transition metal dichalcogenides; 2D material; Humidity sensor; ZrSe2; Spin-coating; Screen printing

Funding

  1. National Research Foundation of Korea (NRF) - Korean government (MSIP) [2020R1A2C1011433]
  2. Qatar National Research Fund (QNRF) [NPRP11S-0110-180246]

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For the first time, a highly sensitive and fast humidity sensor based on 2D Zirconium Diselenide material has been proposed. The sensor shows a high sensitivity of 68 kO / %RH and has good linearity and stability over a wide detection range of 15-80% RH. The sensor has a transient response time of 1-6 seconds for impedance and capacitance, making it suitable for various humidity sensing applications.
Transition metal dichalcogenides (TMDCs), a class of two-dimensional (2D) materials with layered structures, have recently gained a lot of attention for highly sensitive humidity sensing applications. Hence, for the first time, it proposes a highly sensitive and fast humidity sensor based on the 2D Zirconium Diselenide (ZrSe2) material with unique humidity sensing performance via printed technologies. The spin coating technique was used to deposit the 2D ZrSe2 flakes onto the inter-digital electrodes (IDEs). Herein, the bulk ZrSe2 powder was exfoliated into the 2D flakes via wet grinding. The proposed sensor shows a high sensitivity of 68 kO / %RH (where RH is relative humidity) with a wide detection range of (15-80%) RH having good linearity and stability over 360 min. The sensor showed a transient response of 1 s and 2 s for impedance while 3 s and 6 s for capacitance. Hence, the fabricated sensor can be exhibited an ultra-high sensitivity and quick response in various applications: contactless humidity sensing, water spraying test, and skin humidity test. From these exceptional performances, the proposed sensor can be applied in multiple humidity sensing applications.

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