4.8 Article

Emergent ferroelectricity in subnanometer binary oxide films on silicon

Journal

SCIENCE
Volume 376, Issue 6593, Pages 648-+

Publisher

AMER ASSOC ADVANCEMENT SCIENCE
DOI: 10.1126/science.abm8642

Keywords

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Funding

  1. Berkeley Center for Negative Capacitance Transistors (BCNCT)
  2. Applications and Systems-Driven Center for Energy-Efficient Integrated NanoTechnologies (ASCENT)
  3. Defense Advanced Research Projects Agency (DARPA)
  4. DARPA Foundations Required for Novel Compute (FRANC) program
  5. Department of Defense
  6. US Department of Energy (DOE), Office of Science, Office of Basic Energy Sciences, Materials Sciences and Engineering Division [DE-AC0205-CH11231]
  7. DOE Office of Science [AC02-06CH11357]
  8. DOE, Office of Science, Basic Energy Sciences [DE-SC-0012375]
  9. DOE, Office of Science, Office of Basic Energy Sciences [DE-AC0276SF00515, DE-AC02-05CH11231]
  10. DOE Office of Science User Facility [DE-AC02-05CH11231]

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This study reports on the thickness-dependent antiferroelectric-to-ferroelectric phase transition in ultrathin ZrO2 films. The research explores the unconventional ferroelectric size effects in three-dimensional centrosymmetric materials deposited at the two-dimensional thickness limit, offering promising applications for electronics.
The critical size limit of voltage-switchable electric dipoles has extensive implications for energy-efficient electronics, underlying the importance of ferroelectric order stabilized at reduced dimensionality. We report on the thickness-dependent antiferroelectric-to-ferroelectric phase transition in zirconium dioxide (ZrO2) thin films on silicon. The emergent ferroelectricity and hysteretic polarization switching in ultrathin ZrO2, conventionally a paraelectric material, notably persists down to a film thickness of 5 angstroms, the fluorite-structure unit-cell size. This approach to exploit three-dimensional centrosymmetric materials deposited down to the two-dimensional thickness limit, particularly within this model fluorite-structure system that possesses unconventional ferroelectric size effects, offers substantial promise for electronics, demonstrated by proof-of-principle atomic-scale nonvolatile ferroelectric memory on silicon. Additionally, it is also indicative of hidden electronic phenomena that are achievable across a wide class of simple binary materials.

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