View factor modeling of sputter-deposition on micron-scale-architectured surfaces exposed to plasma

Title
View factor modeling of sputter-deposition on micron-scale-architectured surfaces exposed to plasma
Authors
Keywords
-
Journal
JOURNAL OF APPLIED PHYSICS
Volume 119, Issue 11, Pages 113303
Publisher
AIP Publishing
Online
2016-03-17
DOI
10.1063/1.4944035

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