The influence of pressure and gas flow on size and morphology of titanium oxide nanoparticles synthesized by hollow cathode sputtering

Title
The influence of pressure and gas flow on size and morphology of titanium oxide nanoparticles synthesized by hollow cathode sputtering
Authors
Keywords
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Journal
JOURNAL OF APPLIED PHYSICS
Volume 120, Issue 4, Pages 044308
Publisher
AIP Publishing
Online
2016-07-30
DOI
10.1063/1.4959993

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