Scallop-shaped p-type FinFETs with improved short-channel effects immunity and driving current

Title
Scallop-shaped p-type FinFETs with improved short-channel effects immunity and driving current
Authors
Keywords
Drain-induced barrier lowering, Driving current, Field-effect transistors, Scallop-shaped, Subthreshold swing
Journal
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
Volume 140, Issue -, Pages 106337
Publisher
Elsevier BV
Online
2021-12-09
DOI
10.1016/j.mssp.2021.106337

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