Microstructure, mechanical properties and oxidation behaviors of magnetron sputtered NbNx coatings

Title
Microstructure, mechanical properties and oxidation behaviors of magnetron sputtered NbNx coatings
Authors
Keywords
NbN, x, coating, Magnetron sputtering, Microstructure, Mechanical properties, Oxidation resistance
Journal
JOURNAL OF ALLOYS AND COMPOUNDS
Volume 675, Issue -, Pages 22-30
Publisher
Elsevier BV
Online
2016-03-18
DOI
10.1016/j.jallcom.2016.03.109

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